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Home > 제품소개 > SCANNER > Galvo Scanner > Galvo Motor > 6220H

6220H

* Model 6220H Moving Magnet Closed loop Galvanometer Based Optical Scanner
* Supports apertures of 5mm, 8mm, 9mm and 10mm
* Highest Galvo Speeds and Step Response Times
* Maintaining Position Accuracy and Repeatability at High Speeds
* High System Performance and Reliability Over Time

* Laser Material Processing
* Biomedical Systems
* Laser Projection
* Imaging and Printing
* Semiconductor Processing

#1 : 6220H data sheet.pdf

Galvanometer Specifications

All Position Detector specifications apply with Cambridge Technology servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.

Mechanical Specifications

Rated Angular Excursion:   40°
Rotor Inertia:   0.125 gm cm2, +/-10%
Torque Constant:   6.17x104 dyne cm/amp, +/-10%
Maximum Coil Temperature:   110°C
Thermal Resistance (Coil to Case):   1°C/Watt, Max

Electrical Specifications/Drive Mechanism

Coil Resistance:   2.79 Ohms, +/-10%
Coil Inductance:   180 µH, +/-10%
Back EMF Voltage:   108 µV/degree/sec, +/-10%
RMS Current:   3.9 Amperes at Tcase of 50°C, Max
Peak Current:   20 Amperes, Max
Small Angle Step Response Time:   200 µs, with 5mm Y mirror, settled to 99%

Position Detector

Linearity:   99.9 %, Minimum, over 20 degrees. 99.5% Typical, over 40 degrees
Scale Drift:   50 PPM/°C, Maximum
Zero Drift:   15 µrad/°C, Maximum
Repeatability, Short Term:   8 microradians
Output Signal, Common Mode:   155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:   11.7 µA/°, at common mode current of 155 µA, +/-20%



 
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