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Home > 제품소개 > LASER > Excimer Laser > OPEC Preionization

OPEC Preionization
  • Excellent beam homogeneity
  • Low beam divergence
  • Reduced high voltage
  • Reduced gas contamination / improved gas lifetime
  • Extended window cleaning and laser tube service intervals

 

#1 : OPEC Beam Profile Image.gif

* US and EU Patents



 
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