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Home > 제품소개 > LASER > Excimer Laser > Metal Ceramic Tube

Metal Ceramic Tube

• The ATLEX* metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics.
• A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes.

 

#1 : Metal Ceramic Tube singlechamber Round image.gif
The ATLEX* metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics. A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes.



Additionally, an internal dust particle filter, significantly reducing window contamination, is provided as standard. The ATLEX vessel geometry provides symmetrical cooling resulting in an excellent beam quality and beam pointing stability.
 * US and EU Patents




 
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