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Home > 제품소개 > LASER > Excimer Laser

ATLEX M

• Small footprint
• OPEC: ultra-fast preionization technique
• TMC (Total-Metal-Ceramic) vessel
• Air-cooled
• RS-485, RS232 and LWL Interface for system integration
• Flushable optics holder (193 nm)
• Energy stabilization mode
• Meets European CE standard

ATLEX SI

• OPEC: ultra-fast preionization technique
• Laser head volume < 3l
• TMC (Total-Metal-Ceramic) Vessel
• Air-cooled
• RS-485, RS232 and LWL Interface for system integration
• Flushable optics holder (193 nm)
• Meets european CE-standard

Control Software

• Communication settings, backup & restore and parameter printout, available on Start Screen.
• Main laser control screen for all laser operation settings.
• Gas handling screen for automatic or manual gas procedures.
• Logbook for easy monitoring of useful values.

Laser Controller

• Stabilization of pulse energy / average power
• Repetition rate adjustment
• High voltage adjustment
• Trigger modes: internal (built-in), external, burst (int./ext.), continous, single shot
• Auto gas exchange
• Menu guided mirror exchange
• Transport & storage function
• Menu guided gas cylinder exchange
• Safety interlock functions

Metal Ceramic Tube

• The ATLEX* metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics.
• A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes.

OPEC Preionization
  • Excellent beam homogeneity
  • Low beam divergence
  • Reduced high voltage
  • Reduced gas contamination / improved gas lifetime
  • Extended window cleaning and laser tube service intervals
Optics Holder

• Flushable Optics Holder
• Standard Optics Holder

RD-EXC-5, -20, -200, -300

• Please download the datasheet for more detail.



 
sales@mjlinc.com