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| ATLEX M |
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• Small footprint
• OPEC: ultra-fast preionization technique
• TMC (Total-Metal-Ceramic) vessel
• Air-cooled
• RS-485, RS232 and LWL Interface for system integration
• Flushable optics holder (193 nm)
• Energy stabilization mode
• Meets European CE standard |
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| ATLEX SI |
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• OPEC: ultra-fast preionization technique
• Laser head volume < 3l
• TMC (Total-Metal-Ceramic) Vessel
• Air-cooled
• RS-485, RS232 and LWL Interface for system integration
• Flushable optics holder (193 nm)
• Meets european CE-standard |
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| Control Software |
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• Communication settings, backup & restore and parameter printout, a vailable on Start Screen.
• Main laser control screen for all laser operation settings.
• Gas handling screen for automatic or manual gas procedures.
• Logbook for easy monitoring of useful values. |
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| Laser Controller |
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• Stabilization of pulse energy / average power
• Repetition rate adjustment
• High voltage adjustment
• Trigger modes: internal (built-in), external, burst (int./ext.), continous, single shot
• Auto gas exchange
• Menu guided mirror exchange
• Transport & storage function
• Menu guided gas cylinder exchange
• Safety interlock functions |
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| Metal Ceramic Tube |
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• The ATLEX* metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics.
• A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes. |
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| OPEC Preionization |
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- Excellent beam homogeneity
- Low beam divergence
- Reduced high voltage
- Reduced gas contamination / improved gas lifetime
- Extended window cleaning and laser tube service intervals
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| Optics Holder |
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• Flushable Optics Holder
• Standard Optics Holder |
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| RD-EXC-5, -20, -200, -300 |
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• Please download the datasheet for more detail. |
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