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ATLEX M |
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• Small footprint • OPEC: ultra-fast preionization technique • TMC (Total-Metal-Ceramic) vessel • Air-cooled • RS-485, RS232 and LWL Interface for system integration • Flushable optics holder (193 nm) • Energy stabilization mode • Meets European CE standard |
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ATLEX SI |
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• OPEC: ultra-fast preionization technique • Laser head volume < 3l • TMC (Total-Metal-Ceramic) Vessel • Air-cooled • RS-485, RS232 and LWL Interface for system integration • Flushable optics holder (193 nm) • Meets european CE-standard |
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Control Software |
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• Communication settings, backup & restore and parameter printout, a vailable on Start Screen. • Main laser control screen for all laser operation settings. • Gas handling screen for automatic or manual gas procedures. • Logbook for easy monitoring of useful values. |
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Laser Controller |
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• Stabilization of pulse energy / average power • Repetition rate adjustment • High voltage adjustment • Trigger modes: internal (built-in), external, burst (int./ext.), continous, single shot • Auto gas exchange • Menu guided mirror exchange • Transport & storage function • Menu guided gas cylinder exchange • Safety interlock functions |
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Metal Ceramic Tube |
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• The ATLEX* metal-ceramic laser tube is entirely manufactured of halogen, UV-resistant aluminium alloy and ceramics. • A considerable lower rate of gas contamination, long static gas lifetime, and improved electrical reliability are guaranteed by the use of ceramic insulated high voltage feed-throughs of both peaking capacitors and main electrodes. |
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OPEC Preionization |
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- Excellent beam homogeneity
- Low beam divergence
- Reduced high voltage
- Reduced gas contamination / improved gas lifetime
- Extended window cleaning and laser tube service intervals
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Optics Holder |
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• Flushable Optics Holder • Standard Optics Holder |
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RD-EXC-5, -20, -200, -300 |
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• Please download the datasheet for more detail. |
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